Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems
in microelectronic design and fabrication. It covers micromachining of thin films …

In the microscopic world the need of functional prototypes increases, eg as a precondition
for a mould insert fabrication for micro-injection moulding. In this work the direct fabrication …

Pulsed laser sources are widely used for the micro-processing of materials from the
structuring and patterning of surfaces to the direct machining of devices. This paper …

7. Conclusions and Outlook Surface nanostructuring of various films at high spatial
resolutions was performed with great accuracy and reproducibility by using two near-field …

We describe a homebuilt direct laser writing (DLW) system centered on a fluorescence
microscope as an alternative means for the creation of microfluidic masters. Such masters …

Excimer laser micro-machining has emerged as an important manufacturing process for
micro-sized mechanical and optical components. Using the projection mask technique this …

We have recently begun to explore the use of UV laser ablation micromachining to construct
microfluidic devices in polymers. This technique can create microchannels rapidly and …

A laser beam writing system for the fabrication of micro-optical elements as relief structures
in photoresist is described. Using a computer controlled precision xy stage and a modulated …