The improvement of pattern resolution for microsystems fabrication is certainly a proven
method for increasing of micro and nanostructure density. Our novel laser technology could …

Laser induced micro chemical etching of silicon can be used to quickly and cheaply
machine high-quality three-dimensional structures that would otherwise be nearly …

Vigorous research activity has been directed over the last few years to laser processing for
microfabrication. The new techniques that have emerged are motivated by possibilities …

Fabrication by the 'Laser-LIGA'process of three-dimensional structures for micro-fluidic
devices is investigated. Polymer moulds are formed by projection ablation using an excimer …

Conventional photolithography normally utilizes a photomask for patterning light onto a
chemical resist film. Therefore, the accuracy of microfabrication is highly dependent on the …

Laser transfer techniques are becoming widely used for digital microfabrication applications.
These non-lithographic processes can generate high-resolution patterns of complex …

Nonâ•’Conventional Processes: Laser Micromachining Page 1 Chapter 6 Non-Conventional
Processes: Laser Micromachining 1 6.1. Introduction Laser micromachining is based on the …

Excimer laser ablation is a versatile method to generate 2-or 3-D microstructured devices for
mechanics, fluidics, and optics. Particularly, if in 1-D the structure is predefined by a layer …

A novel and simple single-step method of inscribing optical elements on metal-coated
transparent substrates is demonstrated. Laser induced solid ablation (LISA) demands very …

We present a flexible microfluidic channel fabrication platform that can be used to develop
microfluidic chips. A DPSS (diode pumped solid state) frequency quadrupled (λ= 266 nm …