Submicron patterning of aluminum films by laser ablation

DW Doerr, DR Alexander - … and Microfabrication Process …, 1999 - spiedigitallibrary.org
Microfabrication of sub-micron holes on 30 nm thick aluminum films on fused silica was
investigated using pulse durations form 300 fs to 6 ns at 400 nm wavelength …

[引用][C] Fabrication of microoptics with plasma etching techniques

GT Borek, S Kemme - Microoptics and Nanooptics Fabrication, 2010 - CRC Press

Application of reconfigurable pinhole mask with excimer laser to fabricate microfluidic components

K Conlisk, S Favre, T Lasser, GM O'Connor - Microfluidics and …, 2011 - Springer
An excimer laser incorporating a reconfigurable intelligent pinhole mask (IPM) is
demonstrated for the fabrication of microfluidic geometries on a poly (methyl methacrylate) …

Instruments and methods for microfabrication by laser-controlled chemistry

DJ Ehrlich - Nuclear Instruments and Methods in Physics Research …, 1985 - Elsevier
Nuclear Instruments and Methods in Physics Research A239 (1985) 397-402 397 North-Holland,
Amsterdam INSTRUMENTS AND METHODS FOR Page 1 Nuclear Instruments and Methods in …

Time-tailored laser pulses: a new approach for laser micromachining and microfabrication processing

ML Stock, H Endert, RS Patel - … Technology for Micro-Optics …, 2003 - spiedigitallibrary.org
We describe novel designs for production of laser pulses from the nanosecond to the
femtosecond regime which allow optimization to specific material processing requirements …

[PDF][PDF] Nano-patterning by diffraction mask-projection laser ablation

M Maeder, K Zimmer, R Boehme, T Hoeche… - Laser Micro …, 2008 - jlps.gr.jp
Nanostrcutures attached to a substrate promise optical and electronic applications.
Moreover, applications for nanodots in various probing techniques are also aspired. So far …

Laser ablation as a fabrication technique for microfluidic devices

EA Waddell - Microfluidic Techniques: Reviews and Protocols, 2006 - Springer
The use of microfluidic devices is making rapid inroads in the modern laboratory.
Traditionally, devices have been manufactured in silica owing to its well-understood surface …

Fabrication of microchannels by UV laser ablation

S Takahashi, Y Suzuki… - … Symposium on Laser …, 2003 - spiedigitallibrary.org
This paper describes the fabrication of micro-channels in resin for micro-fluidic devices by a
UV laser. Quartz wafers are coated with a 20μm thick BCB resin. Micro-grooves for micro …

High-speed fabrication of microchannels using line-based laser induced plasma micromachining

I Saxena, R Malhotra… - Journal of Micro …, 2015 - asmedigitalcollection.asme.org
Microtexturing of surfaces has various applications that often involve texturing over large
(macroscale) areas with high precision and resolution. This demands scalability and speed …

Excimer laser machining for the fabrication of analogous microstructures

K Zimmer, D Hirsch, F Bigl - Applied surface science, 1996 - Elsevier
Excimer laser ablation is normally used for micromachining of binary structures, for instance
holes or cuts. We investigated new machining techniques for the fabrication of three …