Excimer laser machining for 3D-surface structuring
K Zimmer, A Braun - Photo-Excited Processes, Diagnostics and …, 2003 - Springer
This chapter reviews recent developments in the field of 3D-micromachining of surfaces by
pulsed laser ablation using different mask projection techniques. The first sections introduce …
pulsed laser ablation using different mask projection techniques. The first sections introduce …
Overview of novel approaches for laser microfabrication of advanced materials
K Sugioka - Laser-Assisted Microtechnology 2000, 2001 - spiedigitallibrary.org
Laser processing is quite attractive for micromachining, microstructuring, and modification of
materials. Conventional laser processing using IR, visible, or UV lasers, however, cannot …
materials. Conventional laser processing using IR, visible, or UV lasers, however, cannot …
Advanced laser micromachining processes for MEMS and optical applications
AS Holmes, JEA Pedder… - High-Power Laser …, 2006 - spiedigitallibrary.org
Laser micromachining has great potential as a MEMS (micro-electro-mechanical systems)
fabrication technique because of its materials flexibility and 3D capabilities. The machining …
fabrication technique because of its materials flexibility and 3D capabilities. The machining …
Microfluidic devices produced by micromachining with ultra-short laser pulses
W de Rossi, C da Costa Herrera, NDV Júnior… - Physics …, 2011 - pages.cnpem.br
Complete microfluidic systems are being produced by ultra-short laser pulses machining in
BK7 optical glass. Small structures have been developed to form various components of a …
BK7 optical glass. Small structures have been developed to form various components of a …
Process control in laser material processing for the micro and nanometer scale domains
H Helvajian - Laser Precision Microfabrication, 2010 - Springer
An array of laser material processing techniques is presented for fabricating structures in the
micro and nanometer scale length domains. For the past 20 years, processes have been …
micro and nanometer scale length domains. For the past 20 years, processes have been …
Masks for laser ablation technology: new requirements and challenges
JL Speidell, DP Pulaski, RS Patel - IBM Journal of research and …, 1997 - ieeexplore.ieee.org
Laser ablation is used as a dry patterning process in which an intense beam of light from an
excimer laser is used to pattern a material directly. This process has found extensive …
excimer laser is used to pattern a material directly. This process has found extensive …
Applications of laser ablation to microengineering
MC Gower, NH Rizvi - High-Power Laser Ablation III, 2000 - spiedigitallibrary.org
Applications of pulsed laser ablation to the manufacture of micro-electro-mechanical
systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) devices are …
systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) devices are …
Laser microfabrication from a commercial perspective
CP Christensen Jr - Fifth International Symposium on Laser …, 2004 - spiedigitallibrary.org
Laser microfabrication processes are finding an increasing number of commercial
applications, and, in turn, the promise of commercial application now motivates most current …
applications, and, in turn, the promise of commercial application now motivates most current …