The characteristics of excimer lasers and the nature of ablation and etching processes are
described. The two kinds of laser ablation mechanisms, thermal and electronic, are …

A new method of hybrid photolithography, Laser Augmented Microlithographic Patterning
(LAMP), is described in which direct laser writing is used to define additional features to …

Cantilevers, embedded channels, microcavities, and other high-aspect-ratio geometries
requiring gaps between layers are essential to microfluidic components used for …

The need for advanced materials and systems with new functionalities has motivated the
development of micro/nanostructures on solid surfaces, which are necessary for the …

We report a technically innovative method of fabricating masks for both deep-ultraviolet (UV)
patterning and metal sputtering on polymethylmethacrylate (PMMA) for microfluidic systems …

Kinoform optics: direct fabrication by F2 laser ablation Page 1 Kinoform optics: direct fabrication
by F2 laser ablation Amir H. Nejadmalayeri, Andrew Yick, Jianzhao Li, and Peter R. Herman …

For cellular biology, the idea of incorporating the capabilities of sample preparation,
transport, reaction and analysis on a single chip has recently been revisited due to the …

In contrast to conventional optical fabrication techniques, a single-point laser pattern
generator (LPG) provides a flexible, deterministic method of manufacturing optical …

Laser use for rapid prototyping of microfluidic devices has proven useful but can have
certain drawbacks including variations in channel width, depth and shape when producing …

In the near future the laser source will be used to full effect in microfabrication. The spectral
brightness of the excimer laser will probably propel it to a position as the dominant source …