Industrial applications of laser micromachining

MC Gower - Optics express, 2000 - opg.optica.org
The use of pulsed lasers for microprocessing material in several manufacturing industries is
presented. Microvia, ink jet printer nozzle and biomedical catheter hole drilling, thin-film …

[图书][B] Fundamentals of laser micromachining

R Schaeffer - 2012 - books.google.com
Due to their flexible and efficient capabilities, lasers are often used over more traditional
machining technologies, such as mechanical drilling and chemical etching, in manufacturing …

Recent applications of pulsed lasers in advanced materials processing

HJ Booth - Thin Solid Films, 2004 - Elsevier
Pulsed laser sources are widely used for the micro-processing of materials from the
structuring and patterning of surfaces to the direct machining of devices. This paper …

Micro-machining of metals, ceramics and polymers using nanosecond lasers

MRH Knowles, G Rutterford, D Karnakis… - The International Journal …, 2007 - Springer
Laser micro-processing is an enabling technology that facilitates component miniaturisation
and improved performance characteristics. It is being applied across many industries …

Laser applications in microtechnology

A Gillner, J Holtkamp, C Hartmann, A Olowinsky… - Journal of Materials …, 2005 - Elsevier
The production and machining of micro parts were in the past mainly made by technologies
developed from the electronic industry, which is particularly based on silicon etching …

Precision micromachining with pulsed green lasers

JJ Chang, BE Warner, EP Dragon… - Journal of laser …, 1998 - pubs.aip.org
We have developed high-precision machining based on high-power pulsed green lasers
(30–40 ns pulse width) at multi-kHz repetition rate. Dynamics of material removal has been …

A review of ultrafast laser materials micromachining

J Cheng, C Liu, S Shang, D Liu, W Perrie… - Optics & Laser …, 2013 - Elsevier
A brief review is given regarding ultrafast laser micromachining of materials. Some general
experimental observations are first provided to show the characteristics of ultrafast laser …

Laser beam micromachining (LBMM)–a review

S Mishra, V Yadava - Optics and lasers in engineering, 2015 - Elsevier
The use of short and ultrashort laser pulses for micromachining application is an emerging
technology. Laser Beam MicroMachining (LBMM) has revolutionized many industries by …

Laser micromachining of glass, silicon, and ceramics

L Rihakova, H Chmelickova - Advances in Materials Science …, 2015 - Wiley Online Library
A brief review is focused on laser micromachining of materials. Micromachining of materials
is highly widespread method used in many industries, including semiconductors, electronic …

[图书][B] Laser-assisted microtechnology

SM Metev, VP Veiko - 2013 - books.google.com
Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems
in microelectronic design and fabrication. It covers micromachining of thin films …