New techniques for 3D micromachining by direct laser ablation of materials using excimer
lasers have been developed. Basic to all of these techniques is the use of image projection …

Excimer laser ablation is used in conjunction with mask projection techniques to produce
novel and complex microstructures. Special multiple-mask techniques have been developed …

Excimer laser ablation is normally used for micromachining of binary structures, for instance
holes or cuts. We investigated new machining techniques for the fabrication of three …

Excimer laser ablation provides the micromachining engineer with a unique tool for
patterning, cutting, and structuring a wide variety of materials, including ceramics, glasses …

Micro-machining techniques using pulsed lasers are currently being applied world-wise in
many diverse industrial application areas including biomedical devices, printers, flat-panel …

This chapter reviews recent developments in the field of 3D-micromachining of surfaces by
pulsed laser ablation using different mask projection techniques. The first sections introduce …

Two techniques are described which further extend the scope of laser micro-processing
systems used in industrial applications. One technique, synchronised overlay scanning …

In the coming years, excimer lasers will play two important roles in microelectronic
fabrication: as new light sources for submicron photolithography, and for direct surface …

Excimer laser micromachining has developed into a mature production method and many
industrial applications such as the drilling of ink-jet printer nozzles, production environments …

Excimer laser micromachining using binary mask projection has been investigated for rapid
patterning of single micrometer features over large areas of various substrates. Simple limit …