In order to meet the requirements of dynamic monitoring from a bird's eye view for typical
rapidly changing processes such as mechanical rotation and photoresist exposure reaction …

This thesis gives an introduction to the Mueller-Stokes calculus, which is used to describe
partially and fully polarized light. It describes how polarized light interacts with various …

We propose a dual vortex retarder Mueller matrix ellipsometry (DVRMME) that can extract
16 Mueller matrix elements by analyzing a single intensity image. Two customized vortex …

A new Mueller matrix ellipsometer (MME) is presented. It provides the simultaneous
measurement of the 16 Mueller matrix coefficients in four modulation periods (80 μs under …

A review of the techniques and applications of multichannel ellipsometry in the dual-rotating-
compensator configuration is given. This ellipsometric approach has been established as …

The rotating polarizer spectroscopic ellipsometer (RPSE) has many advantages, such as
simple optical configuration and broadband achromatism. However, the final performances …

There are some commonly-used optimization techniques for the analysis of measured data
in spectroscopic Mueller matrix ellipsometry (MME) used, for example, to calculate the layer …

In this article, a spectroscopic ellipsometer is constructed in rotating polarizer and analyzer
configuration. Instead of continuous rotation and integration for waveform analysis, a step …

The authors introduce an ellipsometric data analysis strategy for a flexible polymeric circular
polarizing filter consisting of a thin linear polarizer and quarter-wave plate sandwich. The …

We address the optimal configuration of a partial Mueller matrix polarimeter used to
determine the ellipsometric parameters in the presence of additive Gaussian noise and …