Spatially polarization-modulated ellipsometry based on the vectorial optical field and image processing

C Gao, B Lei - Applied optics, 2020 - opg.optica.org
We report a new (to the best of our knowledge) ellipsometric measurement scheme called
spatially polarization-modulated ellipsometry (SPME), which is based on the vectorial optical …

[图书][B] Thin film measurements on rough substrates using Mueller matrix ellipsometry

DA Ramsey - 1985 - search.proquest.com
A dual rotating-compensator Mueller matrix ellipsometer has been designed and
constructed to carry out film thickness measurements on rough substrates. Measurements …

Design of a real-time spectroscopic rotating compensator ellipsometer without systematic errors

L Broch, N Stein, A Zimmer, Y Battie, AE Naciri - Thin solid films, 2014 - Elsevier
We describe a spectroscopic ellipsometer in the visible domain (400–800 nm) based on a
rotating compensator technology using two detectors. The classical analyzer is replaced by …

Two-modulator generalized ellipsometry: theory

GE Jellison, FA Modine - Applied optics, 1997 - opg.optica.org
A new ellipsometer is described that uses two photoelastic modulator–polarizer pairs, where
the photoelastic modulators are operating at differing resonant frequencies. The time …

DUV broadband spectroscopic ellipsometer based on all-reflective focusing optical system

G Song, G Cui, Y Chen, T Liu… - 2013 Third International …, 2013 - ieeexplore.ieee.org
Ellipsometer is a powerful tool to determine the thickness and optical properties of thin films.
Usually, traditional spectroscopic ellipsometer employing Tran missive lenses for beam …

Automated Mueller matrix ellipsometry

PS Hauge - Optics Communications, 1976 - Elsevier
The application of rotating-compensator ellipsometry (RCE) to measurements of the system
Mueller matrix M of linear optical systems is reported. This technique extends a previously …

Mueller matrix ellipsometry revisited

BW Bell - Acousto-Optic, Electro-Optic, & Magneto-Optic …, 1987 - spiedigitallibrary.org
The object of ellipsometry is to determine the complex ratio ρ (ρ= tanifi exp (i&)) of the
reflected or transmitted polarization state parameters. Ellipsometry has traditionally been …

Calibration and data reduction for a UV-extended rotating-compensator multichannel ellipsometer

I An, JA Zapien, C Chen, AS Ferlauto, AS Lawrence… - Thin Solid Films, 2004 - Elsevier
A rotating-compensator multichannel ellipsometer has been developed for ultraviolet-
extended real time operation over the spectral range from 1.5 to 6.5 eV. The enhancements …

Alignment method for rotating analyzer ellipsometry

S Kawabata - JOSA A, 1987 - opg.optica.org
A new method of aligning the optical components has been proposed for the polarizer–
specimen–compensator–analyzer ellipsometer configuration. By carrying out the …

Polarization modulation imaging ellipsometry for thin film thickness measurement

C Chou, HK Teng, CJ Yu, HS Huang - Optics communications, 2007 - Elsevier
A polarization modulation (PM) imaging ellipsometer is proposed and setup in order to
measure precisely the thickness of thin film. Five images are collected sequentially by CCD …