57 ABSTRACT A two-modulator generalized ellipsometer (2-MGE) com prising two polarizer-
photoelastic modulator (PEM) pairs, an optical light Source, an optical detection System, and …

I investigate the dependence of shot-noise-limited uncertainties of the ellipsometric
parameters ψ and Δ for the rotating-analyzer ellipsometer (RAE) and the rotating …

Owing to high accuracy in the whole measurement range, the compensator-rotating method
is a main approach for the single-point ellipsometric measurement. The disadvantage of this …

We demonstrate that the ellipsometric parameters of the isotropic samples can be measured
by a partial polarimeter with only eight intensity measurements. Under the Gaussian and …

A multichannel ellipsometer in the dual-rotating-compensator configuration has been
developed for potential applications in real-time Mueller matrix spectroscopy of anisotropic …

The development of multichannel ellipsometers with photodiode array-based detection
systems has enabled real time spectroscopic ellipsometry (SE), a technique now being used …

In the polarizer-compensator-system-analyzer (PCSA) ellipsometer arrangement the nulling
scheme in which P is set and C and A are adjusted for null provides the largest number of …

In this paper, we focus on the metrological aspects of spectroscopic Mueller ellipsometry—ie
on the uncertainty estimation of the measurement results. With the help of simulated Mueller …

A polarizer-compensator-sample-analyzer (PCSA) imaging ellipsometer with large field of
view is presented. The sample is imaged on a CCD sensor by a telecentric imaging system …