Error correction for Mueller matrix ellipsometry based on a reference optical path

J Qi, P Xue, R Zhang, Y An, Z Wang, M Li - Applied Optics, 2023 - opg.optica.org
To reduce the error induced by light source fluctuations, motor rotation instability,
environment, and other factors in real-time measurements using dual-rotating compensator …

Depolarization artifacts in dual rotating-compensator Mueller matrix ellipsometry

W Li, C Zhang, H Jiang, X Chen, S Liu - Journal of Optics, 2016 - iopscience.iop.org
Noticeable depolarization effects are observed in the measurement of the air using an in-
house developed dual rotating-compensator Mueller matrix ellipsometer. We demonstrate …

Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer

W Li, S Liu, C Zhang, X Chen - … International Symposium on …, 2013 - spiedigitallibrary.org
The random noise and the systematic errors caused by azimuthal errors of the optical
elements, ie, the polarizer, the analyzer, or the compensator, would lead to measurement …

Random error analysis of normalized Fourier coefficient in dual-rotating compensator Mueller matrix ellipsometer

Z Miao, Y Tang, K Wei, Y Zhang - Measurement Science and …, 2021 - iopscience.iop.org
Ever since the dual-rotating compensator Mueller matrix ellipsometer (DRC-MME) was
developed, improving its measurement accuracy has been an important research topic …

Second-order systematic errors in Mueller matrix dual rotating compensator ellipsometry

L Broch, AE Naciri, L Johann - Applied optics, 2010 - opg.optica.org
We investigate the systematic errors at the second order for a Mueller matrix ellipsometer in
the dual rotating compensator configuration. Starting from a general formalism, we derive …

Optimization of instrument matrix for Mueller matrix ellipsometry based on partial elements analysis of the Mueller matrix

X Li, H Hu, L Wu, T Liu - Optics express, 2017 - opg.optica.org
We consider the Mueller matrix ellipsometry (MME) measuring the ellipsometric parameters
of the isotropic sample and the anisotropic sample under certain conditions in the presence …

Optimization of stepping Mueller matrix ellipsometer configuration based on weighed factor

Z Miao, Y Tang, K Wei, Y Zhang - Optical Engineering, 2022 - spiedigitallibrary.org
Due to the instability of motor speeds, asynchrony in trigger systems, and mechanical
factors, the use of continuous dual-rotating compensator (DRC)-Mueller matrix ellipsometer …

Measurement errors induced by axis tilt of biplates in dual-rotating compensator Mueller matrix ellipsometers

H Gu, C Zhang, H Jiang, X Chen… - Modeling Aspects in …, 2015 - spiedigitallibrary.org
Dual-rotating compensator Mueller matrix ellipsometer (DRC-MME) has been designed and
applied as a powerful tool for the characterization of thin films and nanostructures. The …

Dual vortex retarder Mueller matrix ellipsometry

C Gao, F Wang, X Wen, J Weng, X Cao, B Lei - Optics and Lasers in …, 2023 - Elsevier
We propose a dual vortex retarder Mueller matrix ellipsometry (DVRMME) that can extract
16 Mueller matrix elements by analyzing a single intensity image. Two customized vortex …

Unevenly spaced continuous measurement approach for dual rotating–retarder Mueller matrix ellipsometry

K Meng, B Jiang, CD Samolis, M Alrished… - Optics express, 2019 - opg.optica.org
In order to efficiently extract the sample Mueller matrix by dual rotating–retarder ellipsometry,
it is critical for the data reduction technique to achieve a minimal data processing burden …