A gas distribution assembly and methods for adjusting the gas flow through a gas supply
unit into a reaction chamber are disclosed. The gas distribution assembly and methods can …

A gas distribution system, a reactor system including the gas distribution system, and
method of using the gas distribution system and reactor system are disclosed. The gas …

(57) ABSTRACT A gas distribution system, a reactor system including the gas distribution
system, and method of using the gas distribution system and reactor system are disclosed …

(57) ABSTRACT A gas injection system, a reactor system including the gas injection system,
and methods of using the gas injection system and reactor system are disclosed. The gas …

A gas injection system, a reactor system including the gas injection system, and methods of
using the gas injection system and reactor system are disclosed. The gas injection system …

One embodiment of the present invention provides a gas-delivery system for delivering
reaction gas to a reactor chamber. The gas-delivery system includes a main gas-inlet port for …

(57) ABSTRACT A showerhead assembly for distributing a gas within a reaction chamber is
disclosed. The showerhead assembly may comprise: a chamber formed within the …

A system and method for providing intermediate reactive species to a reaction chamber are
disclosed. The system includes an intermediate reactive species formation chamber fluidly …

Methods for thermally calibrating reaction chambers are provided. In some embodiments,
methods may include calculating a first correction factor of a first contact type temperature …

A method for supplying gas over a substrate in a reaction chamber wherein a substrate is
placed on a pedestal, includes: supplying a first gas from a first side of the reaction chamber …