[PDF] xjtu.edu.cn

[PDF][PDF] Helium ion microscope fabrication causing changes in the structure and mechanical behavior of silicon micropillars

YC Wang, L Tian, F Liu, YB Qin, G Zheng, JT Wang… - nano.xjtu.edu.cn
The projected range of He+ can be comparable to the dimensions of the micropillars,
extending radiation damage well into the sample interior, and therefore can affect the …
被引用次数：14 相关文章

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

YC Wang, L Tian, F Liu, YB Qin… - … (Weinheim an der …, 2017 - pubmed.ncbi.nlm.nih.gov
Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion
microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely …

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

YC Wang, L Tian, F Liu, YB Qin, G Zheng, JT Wang… - Small, 2017 - infona.pl
Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion
microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely …

[引用][C] Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

YC Wang, L Tian, F Liu, YB Qin, G Zheng, JT Wang… - Small, 2017 - Wiley Online Library
The projected range of He+ can be comparable to the dimensions of the micropillars,
extending radiation damage well into the sample interior, and therefore can affect the …

Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars.

YC Wang, L Tian, F Liu, YB Qin, G Zheng… - Small (Weinheim an …, 2016 - europepmc.org
Silicon is used as a prominent case to demonstrate the dramatic effects of helium ion
microscope nanofabrication. Structurally, a submicrometer Si pillar can turn completely …
[PDF] researchgate.net

[PDF][PDF] Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

YC Wang, L Tian, F Liu, YB Qin, G Zheng, JT Wang… - researchgate.net
The projected range of He+ can be comparable to the dimensions of the micropillars,
extending radiation damage well into the sample interior, and therefore can affect the …

[引用][C] Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical Behavior of Silicon Micropillars

YC Wang, L Tian, F Liu, YB Qin, G Zheng, JT Wang… - Small, 2016 - cir.nii.ac.jp
Helium Ion Microscope Fabrication Causing Changes in the Structure and Mechanical
Behavior of Silicon Micropillars | CiNii Research CiNii 国立情報学研究所 学術情報ナビゲータ[サイニィ …