Outwitting the series resistance in scanning spreading resistance microscopy

Ultramicroscopy, 2016 - Elsevier
The performance of nanoelectronics devices critically depends on the distribution of active
dopants inside these structures. For this reason, dopant profiling has been defined as one of …

Outwitting the series resistance in scanning spreading resistance microscopy

A Schulze, R Cao, P Eyben, T Hantschel… - …, 2016 - pubmed.ncbi.nlm.nih.gov
The performance of nanoelectronics devices critically depends on the distribution of active
dopants inside these structures. For this reason, dopant profiling has been defined as one of …

Outwitting the series resistance in scanning spreading resistance microscopy

A Schulze, R Cao, P Eyben, T Hantschel… - Ultramicroscopy …, 2016 - inis.iaea.org
[en] The performance of nanoelectronics devices critically depends on the distribution of
active dopants inside these structures. For this reason, dopant profiling has been defined as …

Outwitting the series resistance in scanning spreading resistance microscopy.

A Schulze, R Cao, P Eyben, T Hantschel… - …, 2015 - europepmc.org
The performance of nanoelectronics devices critically depends on the distribution of active
dopants inside these structures. For this reason, dopant profiling has been defined as one of …

Outwitting the series resistance in scanning spreading resistance microscopy

A Schulze, R Cao, P Eyben, T Hantschel… - Ultramicroscopy, 2016 - infona.pl
The performance of nanoelectronics devices critically depends on the distribution of active
dopants inside these structures. For this reason, dopant profiling has been defined as one of …

[引用][C] Outwitting the series resistance in scanning spreading resistance microscopy

A Schulze, R Cao, P Eyben, T Hantschel… - 2016 - imec-publications.be
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[引用][C] Outwitting the series resistance in scanning spreading resistance microscopy

A Schulze, R Cao, P Eyben, T Hantschel… - 2013 - imec-publications.be
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