Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard… - Journal of Applied …, 2019 - pubs.aip.org
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …
被引用次数：12 相关文章
[PDF] archive.org

[PDF][PDF] Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard, E Peiner… - scholar.archive.org
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …

Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard… - Journal of Applied …, 2019 - pubs.aip.org
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …

Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard… - Journal of Applied …, 2019 - epub.uni-regensburg.de
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …
[PDF] core.ac.uk

[PDF][PDF] Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard, E Peiner… - core.ac.uk
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …

Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard… - Journal of Applied …, 2019 - ui.adsabs.harvard.edu
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …

Quantitative scanning spreading resistance microscopy on n-type dopant diffusion profiles in germanium and the origin of dopant deactivation

JK Prüßing, G Hamdana, D Bougeard… - Journal of Applied …, 2019 - epub.uni-regensburg.de
Diffusion profiles of arsenic and antimony in undoped and carbon doped germanium (Ge),
respectively, were analysed by means of scanning spreading resistance microscopy …