… been the rapid advances made in the quality and processing of materials – semiconductors,
… This chapter is devoted to the electrical characterization of semiconductors, insulators and …

… advanced research results using AFM in the micro-nano science community to operate in the
four main areas of materials, semiconductor … of the electrical properties of semiconductors …

… In its more than 25-year history, AFM has had its … properties of materials. This chapter will
address the concepts and principles of AFM, as well as various aspects related to electrical …

… precisely utilized in conducting failure analysis of semiconductor devices, and is well …
Apart from its usefulness in characterizing the electrical properties of materials, PC-AFM is a …

… Atomic force microscopy (AFM) and its non-contact electrical modes such as Kelvin probe
… used to characterize the surface electrical properties of metal, dielectric and semiconductor …

… electric properties can be mapped and quantified by AFM … properties in different research
fields such as semiconductors, … , recent developments and applications of the AFM-IR and AFM-…

… Beyond topography and local force control, advanced AFM modes … Uncovering electric
properties such as conductivity, surface … Electrical AFM is well-suited for acquiring these types of …

… Thanks to the major advance of semiconductor fabrication processes, AFM tips are generally
manufactured starting from silicon. Alternatively silicon nitride is used for the tip body, the …

… relying on AFM, while … AFM and complementary techniques. The main focus of these hybrid
techniques is on the combination with optical techniques as there has been much progress …

… Afterwards, significant advancements have been achieved in the fields of combined AFM-…
electrical properties such as conductivity. Mostly used on conductive or dielectric materials …