An improved design based on a symmetrical toggle shunt capacitive RF-MEMS switch with multiple stable states and Off-state frequency tunability

M Angira - Journal of Computational Electronics, 2023 - Springer
Journal of Computational Electronics, 2023Springer
This work presents a design based on a symmetrical toggle switch. The proposed device is
designed using a cantilever structure. The actuation of the switching structure is based on
the torsion principle. A conventional approach-based symmetric toggle switch is also
designed to compare the performance of the proposed device. The device with the
conventional approach can work in 3 stable states, whereas the proposed device has 7
stable states with 4 different on-state and 3 off-state positions. The proposed switch shows a …
Abstract
This work presents a design based on a symmetrical toggle switch. The proposed device is designed using a cantilever structure. The actuation of the switching structure is based on the torsion principle. A conventional approach-based symmetric toggle switch is also designed to compare the performance of the proposed device. The device with the conventional approach can work in 3 stable states, whereas the proposed device has 7 stable states with 4 different on-state and 3 off-state positions. The proposed switch shows a simulated snap-down voltage of 2.5 V compared to 8.5 V in the case of a conventional switch. In the RF response, an insertion loss of 0.1 dB is observed in the X-band compared to 0.06 dB as obtained in the case of the proposed device under the un-actuated position with a gap of 2 µm between the transmission line and switching structure. In the off-state, the proposed device exhibits 2 optimum isolation values of 40 dB at 5 GHz and 45 dB at 10 GHz. The conventional switch shows only 1 peak at 10 GHz. Thus, the proposed device features a significant improvement in the electrical and electromechanical response over the conventional device. The proposed switch can be used in frequency reconfigurable circuits.
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