… SSRM calibration profile has been developed on homoepitaxial ZnO:Ga multilayer staircase
structures … through the NW as indicated in Figure 3(d) is shown in Figure 4. If we assume an …

… from the 2D scan of a staircase structure. These values are … calibration of signal maps to
carrier maps. Any parasitic … that the measured spreading resistance on the ∼1e20 cm −3 layer …

… based on scalpel scanning probe microscopy are being … such as SIMS and spreading
resistance profiling (SRP) provided in … n- and p-type calibration structures. Whereas in the medium …

… Cross sectional measurements on the staircase structures have evidenced a … calibration
curves separately. As results, residual carrier concentrations around 3× 1018 and 2× 1018 cm-3 …

… In practice, the device structure is composed of two scan down … We have also extracted
the spreading resistance profile in … WFIN FinFETs using scalpel SSRM-based calibration of …

… three-dimensional carrier profiling of semiconductor devices … total resistance of the simulated
structure increases with … , the carrier quantification will not be reliable if calibrated against a …

… component inside multilayered 1D structures, for instance, … the sample, enabling SSRM for
2D resistivity/carrier profiling. … , and/or a lack of calibration dataset, 27 we could estimate the …

… and three-dimensional carrier profiles in semiconductor devices … on a TEM lamella to combine
structural, compositional and … of a calibration standard to convert the measured spreading …

… even three-dimensional carrier profiles in three-dimensional … extraction of a calibration
curve from a single scan. However, … on the example of Si-based structures in this paper, the …

… This P-doped Ge structure serves as a calibration sample to … profile was obtained after Sb
diffusion at 700 C for 3 h. This … Ge structure shows a constant carrier profile representative for …