… This P-doped Ge structure serves as a calibration sample to … profile was obtained after Sb
diffusion at 700 C for 3 h. This … Ge structure shows a constant carrier profile representative for …

… phosphorous dopants are measured via calibrated SSRM [5]. … It follows the pyramidal
structure of the surface. For two … We compare the simulated ECV profile and the profiles resulting …

… and carrier concentration depth profiles using calibration … 3 to 1.16e20 #/cm 3 , as
measured with spreading resistance … SSRM profiles obtained for a n-type Si staircase structure …

… of SSRM (Scanning Spreading Resistance Microscopy), SCM (… cantilever and quantitative
analysis using a calibration curve [2]. A … structures in deep sub-micron MOSFETs by scanning …

… Scanning spreading resistance microscopy (SSRM) has … carrier profiling in aggressively
scaled 3D device structures … For this reason, calibration samples covering the entire carrier …

… (SSRM) is able to detect charge carriers with two dimensional (… is to apply a SSRM scan
of a calibration sample with known … Boron profiles in Si bulk and nanopillar structures were …

… scanning spreading resistance microscopy (… calibration sample has multiple layers with
known carrier concentrations, determined by electrochemical capacitance-voltage (ECV) profiling…

… As the resolution of CTEM microscopes is usually 2–3 Å, the atomic structure cannot be
resolved. … of measuring the carrier concentration profile, the mobility, and the carrier lifetime by …

… profile in semiconductors with high spatial resolution. … -SE ellipsometer calibrated by cross
sectional transmission electron … can be minimised to investigate the electronic structure of 5 …

… with a polycrystalline in situ doped structure, with a high (>10 20 at cm −3 ) phosphorus
dopant … SIMS depth profiles using Cs + primary ions at 10 keV energy. Calibration of the SIMS …