… dopant concentration profile in production semiconductor devices. We calibrate the sMIM
using a doped calibration sample … spreading resistance (SSRM) [3] and scanning microwave …

… microscopy can be used for non-destructive carrier profiling … the need for a special calibration
sample. Furthermore, bb-… (APT) or scanning spreading resistance microscopy (SSRM) 20 —…

… We apply the technique to the profiling of dopants in … establish a calibration curve for
both n- and p-type carriers in a … the spreading resistance and the spreading capacitance …

… in the CV profiling data shown in Supplementary Fig. 1. … peltier-cooled InGaAs camera
calibrated to detect the absolute photon … solar cell requires a real CIGSe grain structure. This grain …

… , adjusting/optimizing the doping profile and employing a step-… eter anode spacing for reducing
spreading resistance; see Fig. … -line (TRL) calibration standards were also designed and …

… (SPM) methods allow to image dopant profiles in a range … devices and epitaxially grown
calibration layers. The contact … This SPM technique measures the local spreading resistance …

… in details the challenges (Chapter 3) and the advantages (Chapter 4) of scanning probe …
Vandervorst, “Fast Fourier transform scanning spreading resistance microscopy: a novel …

… 3-D dopant and carrier profiling measurements are necessary. 1.5-D SIMS can be used to
study dopant incorporation in 3-D structures… SIMS, scanning spreading resistance microscopy (…

… complex material structures, the 1D SIMS profiling becomes … spreading resistance microscopy
(SSRM)[13], scanning … -doped wafers verifies the calibration relationship for Si [41, 63]. …

… on atomic force microscopy, scanning electron microscopy, X-… After proper calibration, using
a purely capacitive (dielectric) … (C–V) behavior of the MIS structure in the sMIM capacitance (…