GaAs in a hydrofluoric acid-based electrolyte. The samples were investigated and
characterized through cathodoluminescence (CL), X-ray diffraction (XRD), energy-
dispersive X-ray spectroscopy (EDX), and X-ray photoelectron spectroscopy (XPS). It was
found that after electrochemical etching, the porous layer showed a major decrease in the
CL intensity and a change in chemical composition and in the crystalline phase. Contrary to …