… (Al)GaAs-OI has been extensively used for fabricating high-Q… for AlGaAs is typically based
on chlorine gas chemistry. It has … ) of the core made of multiple GaAs/AlGaAs quantum wells is …

… We found a quadratic relationship between etch rate and chlorine concentration. A … We
fabricated simple high aspect ratio Al x Ga 1-x As nanowaveguides of 800 nm width using the fast …

… The targeted applications of GaAs/AlGaAs waveguide are … In addition, we present the details
of the fabrication, optical … sccm of oxygen and 20 sccm of chlorine at 10 mTorr , with RIE and …

… -matched GaAs substrate, whose refractive index is higher than … The fabrication of such
waveguides with very high and … However, because of the high aspect ratio of the waveguide, …

… of nonlinear optics using AlGaAs implemented deep-etched GaAs/AlGaAs waveguides [5…
Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine …

… We fabricated the aforementioned microresonators using different EBL processes (the …
tremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP …

… the feasibility of the chlorine-based GaAs/AlGaAs etch plasma … The latter can achieve
anisotropic high aspect ratio GaAs … with a high aspect ratio that is challenging to fabricate. The …

… Here we also present our fabrication efforts to fabricate the … a high etch rate recipe, which is
possible only with chlorine. But … the same time we also need to reduce aspect ratio (the ratio …

… nanowires made by ICP-RIE etching using Cl2/N2 chemistry. Microelectronic … Extremely
high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP …

… as an additive gas to Cl 2 /BCl 3 /Ar plasma for producing HAR etching of GaAs/AlGaAs.
The … on our multilayer structure after using this recipe. A very high aspect ratio of 11.37 was …