… of ion flux and ion energy distribution function (IEDF) in synchronously pulsed inductively
coupled … In this paper, we report measurements of the time-averaged and time-resolved ion …

… of the ion to radical flux ratio; how the ion energy distribution … power; and synchronous source
and bias pulsing with or without … Ion energy distributions (IEDs) were measured for a range …

… synchronous pulsed-power, the recess loss of Si could be better controlled due to a decreased
ion flux while maintaining neutral fluxes. … of the energy distribution function which have a …

… energy distribution functions can be controlled by pulsing the … When a synchronous bias
was applied, the ion energy was … The electron density is measured by a Langmuir probe at the …

… the synchronous pulse to about 0.101 for the asynchronous … including the electron and ion
energy distribution functions, are … examining the radial distributions of the ion flux at the bottom …

… measurements were achieved with a mechanical chopper that was synchronized with the
pulsing … In the present study, the ion density drops well below the steady state low power ion …

… For quantitative analysis, we measured the etch depth at 12 … RF bias powers for synchronized
pulsing scheme with four … ion energy distribution functions for synchronized pulsed Si etch …

… The ion energy distribution function at the RF-biased … the electrodes with the inductively
coupled plasma. Applications … well as the possibility of working in a pulse regime. In addition, the …

… of the pulsed plasma was not long enough for the ion density to … of synchronized pulsed bias
with source pulsing, both … was to control the electron energy distribution function (EEDF) in …

… of a synchronous dc bias in the afterglow of pulsed plasma … The control of IEDs using
inductively coupled pulsed plasma … In this study, the electron energy distribution function (EEDF) …