… Magnetic tunnel junctions (MTJ) are promising candidates for the spintronic devices. They
are not only important for the … Patterning process for NiFe/Al 2 O 3 /Co magnetic tunnel …

… Abstract- Nano-patterning magnetic tunnel junction (MTJ) … a novel scalable approach for
MTJ nanopatterning at very … on pre-patterned conducting non-magnetic pillars without post-…

… sample rotation during the etching process. The residual HSQ … patterning resolution on the
Elionix EBL tool resulted in 13 nm diameter structures in HSQ but the pattern transfer process …

… preferred etching technique is still Ion Beam etching (IBE) [1]. However this technique is not
… the reYdeposition on the sidewalls of the tunnel junctions. Etching at some angle leads to …

… For this purpose, we recently proposed a novel approach for the patterning of … -patterned
conducting pillars. Those are made of a non-magnetic material for which the patterning process …

… They then proceeded to exfoliate graphene using the recently discovered scotch tape method
[43] on the patterned silicon substrate. The SiO 2 thickness was chosen in order to provide …

The first aim of the thesis is to study the feasibility of a new process for nanopatterning of sub-30nm
diameter tunnel junctions recently patented by Spintec and LTM and to test the …

… The magnetic tunnel junction (MTJ) using MgO barrier is one of … In this work, we have
developed a method to fabricate high-… In their methods, a patterned ribbon layer was coated to …

… Recently, a simpler approach was … approach to perform smooth lift off to produce patterned
thin films without creating spikes/notches along the side edges of metal films. Our approach …

… was patterned using a conventional magnetoresistive random access memory (MRAM) BEC
process … The deposited MTJ films were measured with current in-plane tunneling technique …