Plasma and annealing treatments to form height-barrier Ni-based Schottky contact to n-GaN

TJ Lee, HS Im, TY Seong - ECS Journal of Solid State Science …, 2019 - iopscience.iop.org
… nm) layer was deposited for forming ohmic contacts to n-GaN. … The temperature dependence
of GaN Schottky diodes was … 2 –V plots of the Ni-based Schottky diodes with and without …

Morphological and electrical properties of Nickel based Ohmic contacts formed by laser annealing process on n-type 4H-SiC

S Rascunà, P Badalà, C Tringali, C Bongiorno… - … Processing, 2019 - Elsevier
… properties of Ni-based back-side Ohmic contacts formed by laser … integrated in the fabrication
of 650V SiC Schottky diodes. … 1a,b), a high temperature RTA process (900–1000 C) is …

Ideal Ni-based 4H–SiC Schottky barrier diodes with Si intercalation

M Gao, L Fan, Z Chen - Materials Science in Semiconductor Processing, 2020 - Elsevier
… be applied to fabricate the ideal 4H–SiC Schottky diodes. … SBI at low temperatures (400
C–500 C), while the formation of both … The backside Ohmic contact was formed by Ni–W bilayer …

Rapid-thermal-annealing-induced microstructural evolution of Au/Ni/β-Ga2O3 Schottky diodes correlated with their electrical properties

V Janardhanam, S Boldbaatar, I Jyothi, DH Kim… - Journal of Alloys and …, 2022 - Elsevier
… barrier height, and on the deposition and post-deposition treatment … the structural evolution
of Ni-based Schottky contacts on β-… at 550 C for 30 s for ohmic contact formation. To form …

Temperature-dependent electrical characteristics of β-Ga2O3 diodes with W Schottky contacts up to 500° C

C Fares, F Ren, SJ Pearton - ECS Journal of Solid State Science …, 2018 - iopscience.iop.org
… more thermally stable than conventional Ni-based Schottkies on Ga 2 O … After ohmic metal
deposition, contact formation was … The Schottky diodes measured in this study were 210 μm in …

Fabrication and characterization of a silicon carbide based schottky barrier diode

RS Shekhawat, SM Islam, S Kumar, S Singh… - Journal of Electronic …, 2023 - Springer
… a Schottky diode containing a metal–semiconductor Schottky … using Ni, and a triple layer of
Ti/Pt/Au was used for the ohmicprocessing play a crucial role in the performance of the SiC …

Barrier height variation in Ni-based AlGaN/GaN Schottky diodes

M Hajłasz, JJTM Donkers, S Pandey… - … on Electron Devices, 2017 - ieeexplore.ieee.org
… annealing treatment at an optimized temperature within a 800… The etching had only a small
influence on the Schottky contact … the Ohmic contact and the outer ones are Schottky contacts. …

Ohmic Contact Mechanism for Ni/C‐Faced 4H‐n‐SiC Substrate

S Kim, HK Kim, M Lim, S Jeong, MJ Kang… - Journal of …, 2019 - Wiley Online Library
Ni-based metal structures have been also studied in order to form the low resistance ohmic
contact even under the low temperature … the formation of Ni-silicide by thermal treatment may …

Studies on the thermal stability of Ni/n–GaN and Pt/n–GaN Schottky barrier diodes

A Kumar, S Mahajan, S Vinayak… - Materials Research …, 2016 - iopscience.iop.org
… High temperature annealing of Ni and Pt Schottky diodes on … Figure 1(b) displays I–V
characteristics of ohmic contacts … However, Ni based alloys might be produced at the Ni/GaN …

Temperature dependent electrical studies on Cu/AlGaN/GaN Schottky barrier diodes with its microstructural characterization

M Garg, A Kumar, H Sun, CH Liao, X Li… - Journal of Alloys and …, 2019 - Elsevier
… ) Schottky diodes on Al 0.25 Ga 0.75 N/GaN heterostructures grown on Silicon have been
investigated using temperature … An ideality factor (η) of 1.3 at room temperature (RT) signified …