Novel bottom-up sub-micron architectures for advanced functional devices

C Busa - 2018 - etheses.bham.ac.uk
… gold plating conditions finally enabled sub-100nm structures which show promising optical
… b) These produce an amplification of the surface undulation at the characteristic wavelength …

Controlled fracture and mode-mixity dependence of nanoscale interconnects

H Li, M Kuhn - IEEE Transactions on Device and Materials …, 2017 - ieeexplore.ieee.org
… However, the degraded mechanical and chemical robustness of the low-k dielectrics are …
In the sub-100nm regime, the agreement of our results with the Cu/Ta(9nm) bilayer result is …

Buckling and postbuckling of etching-induced wiggling in a bilayer structure with intrinsic compressive stress

D Okumura, J Sugiura, H Tanaka… - … Journal of Mechanical …, 2018 - Elsevier
… However, for the analysis of a bilayer structure with mask and masked layers, the mask layer
includes the … Undulation of sub- 100nm porous dielectric structures: a mechanical analysis

Advanced optical modeling of TiN metal hard mask for scatterometric critical dimension metrology

P Ebersbach, AM Urbanowicz… - … and Process Control …, 2017 - spiedigitallibrary.org
… Since the dielectric function of TiN exhibits thickness dependence, we had to take this fact …
Moreover, presence of the highly absorbing films influences extracted thicknesses of dielectric

[HTML][HTML] Surface sulfurization of amorphous carbon films in the chemistry of oxygen plasma added with SO2 or OCS for high-aspect-ratio etching

K Ishikawa, Y Aoki, H Sato, J Kawakami, S Tsuno… - Applied Surface …, 2024 - Elsevier
… to analyze the film thickness. The stack structure of the aC film on the Si substrate was
analyzed using a model based on the Tanguy formulation [38], [39], [40] to represent the dielectric

Study of plasmonic nano-arrays for the development of cost-effective SERS substrate

LK Lim - 2018 - dr.ntu.edu.sg
… A small sphere with a complex dielectric constant ε(ν) in a surrounding medium of
dielectric constant ε0 is used to represent the metallic nano-structure. The …

[PDF][PDF] Phonon-protected superconducting qubits

M Odeh - 2023 - digitalassets.lib.berkeley.edu
… The resonator characteristic impedance Ztml and effective permittivity ϵeff are the two main
properties of the TL that can be adjusted by controlling the trace width s and ground spacing …

Electrostatic Effects on Lipid Bilayer Physicochemal Properties and Vesicle Adhesion

O Zabala-Ferrera - 2023 - scholarworks.umass.edu
… Stepwise increase in current from 0 to 50 pA reflects the incorporation of a single pore.
This image was reprinted under the creative commons license found at: https://creativecommons.…