Z Deng, C Lai, J Zhou, Y Wang - Microsystem Technologies, 2023 - Springer
This paper designs and analyzes a novel RF MEMS capacitive switch with a high on/off capacitance ratio and low pull-in voltage. Compared with general capacitive RF MEMS …
H Wei, Z Deng, X Guo, Y Wang… - … of Micromechanics and …, 2017 - iopscience.iop.org
In this paper, high on/off capacitance ratio radio frequency micro-electro-mechanical- systems (RF MEMS) switches are designed, fabricated, measured and analyzed. Two types …
Z Deng, Y Wang, K Deng, C Lai, J Zhou - Micromachines, 2022 - mdpi.com
In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro- electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated …
K Deng, F Yang, Y Wang, C Lai, K Han - Micromachines, 2021 - mdpi.com
In this paper a high capacitance ratio and low actuation voltage RF MEMS switch is designed and fabricated for Ka band RF front-ends application. The metal-insulator-metal …
Y Jang, S Kang, HC Kim, K Chun - Journal of Micromechanics …, 2011 - iopscience.iop.org
A double-actuation RF microelectromechanical system (MEMS) switch with high isolation and low voltage operation for RF and microwave applications is presented. The operation …
C Lai, Z Deng, Y Wang - 2022 IEEE Electrical Design of …, 2022 - ieeexplore.ieee.org
An RF MEMS capacitive switch, which has a high capacitance ratio and low pull-in voltage, is designed and analyzed in this paper. The switch can change the switch's up and down …
J Zhou, F Yang, K Deng, C Lai - 2023 - researchsquare.com
This paper presents a novel radio frequency micro-electro-mechanical systems (RF MEMS) switch fabricated on a high resistivity silicon substrate. Slots, like square interleaved slots …
Isolation and actuation voltages are important parameters in micro-electro-mechanical switches. These parameters can be destroyed by the effect of creating bulge and erosion in …
KG Sravani, TL Narayana, K Guha, KS Rao - Microsystem Technologies, 2021 - Springer
In this paper, we have analyzed the role of dielectric layer and different beam membranes on the performance parameters of shunt capacitive RF MEMS switch. The investigation …