This paper presents a paradigm shift in RF MEMS, and shows the development of miniature
switched capacitors for RF applications. The MEMS bridges are 21/spl mu/m long by 8/spl …

This paper presents digital-type RF MEMS switched capacitors built in a coplanar
waveguide (CPW) configuration. In this design, a MEMS shunt bridge is fabricated over an …

We have developed a miniature RF MEMS switched capacitor with a capacitance ratio of 5.2
(Cu= 10 fF, Cd= 52 fF) and an actuation voltage of 30 V. The device is suitable for operation …

This paper presents the power handling and linearity of a capacitive series MEMS switch.
The switching time as a function of incident RF power is also discussed. The MIT Lincoln …

This paper presents miniature RF MEMS switched capacitors with pull-down and pull-up
electrodes for increased capacitance ratio and power handling. A 2× 2 switch array has …

The dielectric charging caused by high actuation voltages is one of the reasons behind the
poor reliability of capacitive MEMS switches. This paper reports the design, fabrication and …

The first experimental characterization of dielectric charging within capacitive RF MEMS
switches has been demonstrated. Standard devices have been inserted into a time domain …

This paper presents the design, fabrication and testing of a novel electrostatically actuated
capacitive shunt switch for X-band applications. By introducing warped bimetallic beams …

This paper presents an RF MEMS switched-capacitor suitable for tunable filters and
reconfigurable matching networks. The switched-capacitor results in a capacitance ratio of …

This paper presents a temperature-stable RF MEMS shunt capacitive switch which employs
a circular beam geometry. The circular switch reduces the effect of stress changes versus …