K Pandey, K Paredis, AJ Robson… - Journal of Applied …, 2020 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) is a powerful technique for quantitative two-and three-dimensional carrier profiling of semiconductor devices with sub-nm spatial …
P De Wolf, M Geva, T Hantschel, W Vandervorst… - Applied physics …, 1998 - pubs.aip.org
Scanning spreading resistance microscopy (SSRM) is an analytical technique originally developed for measuring two-dimensional carrier distribution in Si device structures with …
D Alvarez, J Hartwich, M Fouchier, P Eyben… - Applied physics …, 2003 - pubs.aip.org
Scanning spreading resistance microscopy is a two-dimensional carrier profiling technique now widely used for the characterization of silicon (Si) devices as well as other …
P Eyben, D Degryse, W Vandervorst - AIP Conference Proceedings, 2005 - pubs.aip.org
The spatial resolution of scanning spreading resistance microscopy (SSRM) has been investigated experimentally by using dedicated test structures composed of a series of ultra …
Within this study, the authors have investigated scanning spreading resistance microscopy (SSRM) measurements on silicon samples under different environmental conditions. The …
RP Lu, KL Kavanagh, SJ Dixon-Warren… - Journal of Vacuum …, 2002 - pubs.aip.org
Two-dimensional (2D) carrier concentration profiling using scanning spreading resistance microscopy (SSRM) has been carried out on molecular beam epitaxy-grown GaAs and InP …
D Alvarez, S Schomann, B Goebel… - JOURNAL OF …, 2004 - researchgate.net
The continuous down scaling of the semiconductor devices demands adequate characterization techniques, able to provide quantitative information with high spatial …
T Clarysse, P Eyben, T Hantschel… - Materials Science in …, 2001 - Elsevier
The manufacturing of state-of-the-art electronic devices involves an increasing demand for the accurate determination of ultra-shallow electrical carrier profiles related to the need to …
W Vandervorst, P Eyben, S Callewaert… - AIP Conference …, 2001 - pubs.aip.org
Recent developments in scanning spreading resistance microscopy have enabled to move the technique from the laboratory phase to a commercially available method for 2D-carrier …