… 4 W MEMS relay that utilizes a dual contact-material system and … So far, commercialized
MEMS relays have achieved a power … , a method that used dual contact materials [6], where the …

… A conventional MEMS switch consists of a cantilever … MEMS switches are fabricated by
microelectronic techniques … force of the conventional MEMS switch without enlargement of its …

… force of the previous cantilevertype dual-contact material MEMS relay, we designed a platetype
… Yoon, “A complementary dual-contact MEMS switch using a ‘Zipping’ technique,” J. Micro…

… Yoon, “Complementary dual-contact switch using soft and hard contact materials for achieving
… Yoon, “A complementary dual-contact MEMS switch using a ‘zipping’ technique,” J. Micro…

… (MEM/NEM) switches have attracted considerable interest as promising candidates for
use in future integrated circuits to overcome the limitations of complementary metal-oxide …

… We previously reported a MEM switch with CNT network as contact material by using a
solution-based CNT deposition process [13]. The switch fabrication does not involve any high-…

… which is compatible with the conventional, complementary metal-oxide-… to the survivability
of a MEMS switch. As a core part of the … 3, we use the least square method for curve fitting. The …

… new class of MEMS switches, which we term “wavy switch”, by … 8 wavy switch designs
are provided in Supplementary Table … , the use of multiple switch contacts that result in a “zipping” …

… claims on switching performance, and complements aforementioned … layer is not imaged
accurately via this white light interferometry technique. … Stable zipping RF MEMS varactors …

… as building blocks for many microelectromechanical systems (MEMS) and nanoelectromechanical
… Using a different technique, Orunand Guler [57] studied the influence of perforation …