… (Al)GaAs-OI has been extensively used for fabricating high-Q… for AlGaAs is typically based
on chlorine gas chemistry. It has … ) of the core made of multiple GaAs/AlGaAs quantum wells is …

… The targeted applications of GaAs/AlGaAs waveguide are … In addition, we present the details
of the fabrication, optical … sccm of oxygen and 20 sccm of chlorine at 10 mTorr , with RIE and …

… of nonlinear optics using AlGaAs implemented deep-etched GaAs/AlGaAs waveguides [5…
Extremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine …

… We fabricated the aforementioned microresonators using different EBL processes (the …
tremely high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP …

… the feasibility of the chlorine-based GaAs/AlGaAs etch plasma … The latter can achieve
anisotropic high aspect ratio GaAs … with a high aspect ratio that is challenging to fabricate. The …

… nanowires made by ICP-RIE etching using Cl2/N2 chemistry. Microelectronic … Extremely
high aspect ratio GaAs and GaAs/AlGaAs nanowaveguides fabricated using chlorine ICP …

… as an additive gas to Cl 2 /BCl 3 /Ar plasma for producing HAR etching of GaAs/AlGaAs.
The … on our multilayer structure after using this recipe. A very high aspect ratio of 11.37 was …

… that less material is used for this fabrication method, which is … that chlorine is required to
achieve high enough aspect ratio (… In this project the gas mixture used consists of chlorine (Cl2), …

… By employing FBMS optical lithography, low pressure and low chlorine concentration
etching, and resist reflow, we reduced the RMS area sidewall roughness in test GaAs sample …

… SEM of a deep, high-aspect-ratio silicon trench fabricated using the Bosch TM process …
nano-waveguides in GaAs and GaAs/AlGaAs heterogeneous material layers using a chlorine …