Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization

LN Thalluri, K Guha, K Srinivasa Rao… - Microsystem …, 2020 - Springer
… mainly concentrate on fabrication of high reliable RF MEMS switch with best performance in
… In this work, we have fabricated and characterized shunt capacitive RF MEMS switch using …

Design, modeling and analysis of perforated RF MEMS capacitive shunt switch

KS Rao, CG Chand, KG Sravani, D Prathyusha… - IEEE …, 2019 - ieeexplore.ieee.org
… , and analysis of bridge type structure based capacitive RF MEMS switch with different … the
overall performance of the switch in terms of mechanical, electrical and RF properties. Silicon …

An analytical capacitance modeling of step structured perforated RF MEMS switch

KG Sravani, K Guha, KS Rao - Microsystem Technologies, 2022 - Springer
… In this paper, we have proposed an analytical capacitance model based on ligament
efficiency to implemented for the step structure perforated RF MEMS shunt switch. The proposed …

… and Analysis of MEMS Shunt Capacitive Switch with Si3N4 Dielectric and Au Beam Material to Improve Actuation Voltage and RF Performance in Consideration …

Kurmendra, R Kumar - Transactions on Electrical and Electronic Materials, 2019 - Springer
RF MEMS switch membrane is actuated by using different actuation mechanism such as
electrostatic actuation [5], thermal actuation [6], electromagnetic actuation [7] etc. Despite of …

RF micro-electro-mechanical system (MEMS) capacitive switch performance parameters and improvement strategies

Kurmendra, R Kumar - Microsystem Technologies, 2022 - Springer
RF MEMS switch performance in terms of actuation voltage can also be improved by
incorporating perforations … The performance of an RF MEMS capacitive switch also decided on the …

Design, Simulation and Analysis of Perforated RF MEMS Capacitive Shunt Switch

SR Karumuri, CG Chand, K Guha… - Micro and …, 2021 - ingentaconnect.com
… beam type capacitive RF MEMS switch is designed and simulated. The switch is considered
as meanders and perforations, and … analysis including upstate and downstate capacitance

A novel capacitive RF-MEMS switch for multi-frequency operation

M Angira, D Bansal, P Kumar, K Mehta… - Superlattices and …, 2019 - Elsevier
… a novel capacitive RF-MEMS switch. The presented device has frequency reconfigurable
characteristics and thus can be used in multi-band wireless systems. The switch is realized …

Design, analysis and simulation of RF MEMS capacitive shunt switch with perforations for Ka-band applications

K Srinivasa Rao, K Girija Sravani… - … on Electrical and …, 2022 - Springer
… the design and analysis of an RF MEMS Shunt switch with low pull-in voltage and good RF
… and simulation of a capacitive shunt RF MEMS fixed–fixed switch analyzed at a frequency of …

An intensive approach to optimize capacitive type RF MEMS shunt switch

PA Kumar, KS Rao, KG Sravani, B Balaji, M Aditya… - Microelectronics …, 2021 - Elsevier
… maintain the capacitance at 37 ​fF for perforated switch design, … meander switch are feasible
to fabricate and propagates RF … The final dimensions to fabricate the proposed switch are …

Design and analysis of novel RF-MEMS capacitive type shunt switch for 5G applications

CG Chand, R Maity, K Srinivasarao, NP Maity… - … on Electrical and …, 2022 - Springer
analysis of the RF-MEMS Capacitive type switch. Here, we have proposed different stages
of shunt switches … By decreasing the pull-in voltage we have taken perforations and different …