The urgency of solving the problem of ensuring the security of cyber-physical systems is due to ensure their correct functioning. Cyber-physical system applications have a significant impact on different industrial sectors. The number and variety of cyber-attacks are growing, aimed not only at obtaining data from cyber-physical systems but also managing the production process itself. Detecting and preventing attacks on cyber-physical systems is critical because they can lead to financial losses, production interruptions, and therefore endanger national security. This paper proposes a deep hybrid model based on three parallel neural architectures: a one-dimensional convolutional neural network, a gated recurrent unit neural network, and a long short-term memory neural network. The SPOCU activation function is considered in hidden layers of the proposed model and improves its performance. Furthermore, to improve the classification accuracy, a modified version of Adam optimizer is considered. The experiments are conducted on two datasets: raw water treatment plant and gasoil heater loop process as the cyber-physical system applications. They contain information about the normal behavior of these systems and their failures caused by cyber-attacks. The results show that the proposed model outperforms the recent works using machine learning techniques.