[HTML][HTML] The EBSD spatial resolution of a Timepix-based detector in a tilt-free geometry
AL Marshall, J Holzer, P Stejskal, CJ Stephens… - Ultramicroscopy, 2021 - Elsevier
Performing EBSD with a horizontal sample and a parallel EBSD detector sensor, enables
safer specimen movements for data collection of large specimen areas and improves the
longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at
normal incidence to the electron beam has been revisited via the use of a direct electron
detection (DED) sensor. In this article we present a fully operational DED EBSD detection
system in this geometry, referred to as the tilt-free geometry. A well-defined Σ= 3 [101]{121} …
safer specimen movements for data collection of large specimen areas and improves the
longitudinal spatial resolution. The collection of electron backscattering patterns (EBSPs) at
normal incidence to the electron beam has been revisited via the use of a direct electron
detection (DED) sensor. In this article we present a fully operational DED EBSD detection
system in this geometry, referred to as the tilt-free geometry. A well-defined Σ= 3 [101]{121} …
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