A universal method for depositing patterned materials in situ

Y Chen, SF Hung, WK Lo, Y Chen, Y Shen… - Nature …, 2020 - nature.com
Current techniques of patterned material deposition require separate steps for patterning
and material deposition. The complexity and harsh working conditions post serious …

Recent Advances in Direct Optical Patterning of Inorganic Materials and Devices

S Baek, JS Son - Advanced Physics Research, 2024 - Wiley Online Library
Direct patterning technology holds significant promise owing to its ability to streamline
complex patterning processes, fostering affordable design and production of various …

Direct writing of metal nanostructures: lithographic tools for nanoplasmonics research

GJ Leggett - ACS nano, 2011 - ACS Publications
Continued progress in the fast-growing field of nanoplasmonics will require the development
of new methods for the fabrication of metal nanostructures. Optical lithography provides a …

Nanopatterning with UV optical lithography

M Rothschild, TM Bloomstein, N Efremow Jr… - MRS bulletin, 2005 - Springer
Optical lithography at ultraviolet (UV) wavelengths is the standard process for patterning 90-
nm state-of-the-art devices in the semiconductor industry, and extensions to 45 nm and …

Subwavelength direct-write nanopatterning using optically trapped microspheres

E Mcleod, CB Arnold - Nature nanotechnology, 2008 - nature.com
A number of non-lithographic techniques are now available for processing materials on the
nanoscale, including optical techniques,,,,,, capable of producing features that are much …

Nanoscale ablation through optically trapped microspheres

R Fardel, E McLeod, YC Tsai, CB Arnold - Applied Physics A, 2010 - Springer
The ability to directly create patterns with size scales below 100 nm is important for many
applications where the production or repair of high resolution and density features is …

Fabrication of smooth patterned structures of refractory metals, semiconductors, and oxides via template stripping

JH Park, P Nagpal, KM McPeak… - … applied materials & …, 2013 - ACS Publications
The template-stripping method can yield smooth patterned films without surface
contamination. However, the process is typically limited to coinage metals such as silver and …

Patterning 2D materials for devices by mild lithography

M Weinhold, PJ Klar - RSC advances, 2021 - pubs.rsc.org
2D materials have been intensively studied for almost two decades and are now exhibiting
exceptional properties. Thus, devices that integrate 2D materials offer many novel …

Emerging fabrication techniques for 3D nano-structuring in plasmonics and single molecule studies

F De Angelis, C Liberale, ML Coluccio, G Cojoc… - Nanoscale, 2011 - pubs.rsc.org
The application of new methods and techniques to fields such as biology and medicine is
becoming more and more demanding since the request of detailed information down to …

Comparison of fabrication methods of sub-100nm nano-optical structures and devices

P Hoffmann, I Utke, A Perentes, T Bret… - … and Systems II, 2005 - spiedigitallibrary.org
Nano-optical devices are raising more and more interest for a variety of applications. From
single molecule detection at high molecular concentration by Fluorescence Correlation …