“Sketch and peel” lithography for high-resolution multiscale patterning

Y Chen, Q Xiang, Z Li, Y Wang, Y Meng, H Duan - Nano letters, 2016 - ACS Publications
We report a unique lithographic process, termed “Sketch and Peel” lithography (SPL), for
fast, clean, and reliable patterning of metallic structures from tens of nanometers to …

Alternative lithography

CM Sotomayor Torres - Alternative Lithography, 2003 - Springer
Progress in nanotechnology depends upon the capability to fabricate nanostructures in a
varietyof materialswith accuracyin the nanometrescale and sometimesin the atomic scale …

Light-directed nanosynthesis: near-field optical approaches to integration of the top-down and bottom-up fabrication paradigms

GJ Leggett - Nanoscale, 2012 - pubs.rsc.org
The integration of top-down (lithographic) and bottom-up (synthetic chemical)
methodologies remains a major goal in nanoscience. At larger length scales, light-directed …

Nanopatterning on rough surfaces using optically trapped microspheres

YC Tsai, R Fardel, CB Arnold - Applied Physics Letters, 2011 - pubs.aip.org
While nanofabricated structures find an increasingly large number of applications, few
techniques are able to pattern rough or uneven surfaces, or surfaces with pre-existing …

Nanofabrication: the unsung hero in enabling advances in nanophotonics

P Chengfeng, Z Shutao, M Farsari, SH Oh… - Nanophotonics, 2023 - degruyter.com
Nanophotonics plays an important role in driving innovation in a growing number of fields
over the last several decades. Many of the innovations that impact our daily lives, eg …

Toward scalable flexible nanomanufacturing for photonic structures and devices

W Qiao, W Huang, Y Liu, X Li, LS Chen… - Advanced …, 2016 - Wiley Online Library
Continuous and scalable nanopatterning over flexible substrates is highly desirable for both
commercial and scientific interests, but is difficult to realize with traditional photolithographic …

Nanoscale photolithography with visible light

JT Fourkas - The Journal of Physical Chemistry Letters, 2010 - ACS Publications
Industrial approaches to improving lithographic resolution rely upon using radiation or
charged particles of ever shorter wavelengths. Working with such light or particles is difficult …

Fabrication of micro-and nano-structured materials using mask-less processes

S Roy - Journal of Physics D: Applied Physics, 2007 - iopscience.iop.org
Micro-and nano-scale devices are used in electronics, micro-electro-mechanical, bio-
analytical and medical components. An essential step for the fabrication of such small scale …

3D-tailored gold nanoparticles for light field enhancement and harvesting over visible-IR spectral range

L Rosa, K Sun, V Mizeikis, S Bauerdick… - The Journal of …, 2011 - ACS Publications
A method for practical area upscaling of nanopatterning for light-harvesting and
photocatalytic applications is presented. Large area electron beam lithography is used to …

Direct optical lithography of functional inorganic nanomaterials

Y Wang, I Fedin, H Zhang, DV Talapin - Science, 2017 - science.org
Photolithography is an important manufacturing process that relies on using photoresists,
typically polymer formulations, that change solubility when illuminated with ultraviolet light …