Perforated serpentine membrane with AlN as dielectric material shunt capacitive RF MEMS switch fabrication and characterization

LN Thalluri, K Guha, K Srinivasa Rao… - Microsystem …, 2020 - Springer
… mainly concentrate on fabrication of high reliable RF MEMS switch with best performance in
… In this work, we have fabricated and characterized shunt capacitive RF MEMS switch using …

An analytical capacitance modeling of step structured perforated RF MEMS switch

KG Sravani, K Guha, KS Rao - Microsystem Technologies, 2022 - Springer
… In this paper, we have proposed an analytical capacitance model based on ligament
efficiency to implemented for the step structure perforated RF MEMS shunt switch. The proposed …

RF micro-electro-mechanical system (MEMS) capacitive switch performance parameters and improvement strategies

Kurmendra, R Kumar - Microsystem Technologies, 2022 - Springer
RF MEMS switch performance in terms of actuation voltage can also be improved by
incorporating perforations … The performance of an RF MEMS capacitive switch also decided on the …

Design, Simulation and Analysis of Perforated RF MEMS Capacitive Shunt Switch

SR Karumuri, CG Chand, K Guha… - Micro and …, 2021 - ingentaconnect.com
… beam type capacitive RF MEMS switch is designed and simulated. The switch is considered
as meanders and perforations, and … analysis including upstate and downstate capacitance

Design, analysis and simulation of RF MEMS capacitive shunt switch with perforations for Ka-band applications

K Srinivasa Rao, K Girija Sravani… - … on Electrical and …, 2022 - Springer
… the design and analysis of an RF MEMS Shunt switch with low pull-in voltage and good RF
… and simulation of a capacitive shunt RF MEMS fixed–fixed switch analyzed at a frequency of …

An intensive approach to optimize capacitive type RF MEMS shunt switch

PA Kumar, KS Rao, KG Sravani, B Balaji, M Aditya… - Microelectronics …, 2021 - Elsevier
… maintain the capacitance at 37 ​fF for perforated switch design, … meander switch are feasible
to fabricate and propagates RF … The final dimensions to fabricate the proposed switch are …

Design and analysis of novel RF-MEMS capacitive type shunt switch for 5G applications

CG Chand, R Maity, K Srinivasarao, NP Maity… - … on Electrical and …, 2022 - Springer
analysis of the RF-MEMS Capacitive type switch. Here, we have proposed different stages
of shunt switches … By decreasing the pull-in voltage we have taken perforations and different …

Effect of perforations on fabricated iterative meandered RF MEMS switch for millimeter wave applications

PA Kumar, KS Rao, KG Sravani - Microsystem Technologies, 2021 - Springer
… In this paper, the perforations are introduced in the fabrication process to release the …
operating frequency of RF signal during transmission. The fabricated perforated switch shows low …

Design of reconfigurable antenna by capacitive type RF MEMS switch for 5G applications

KG Sravani, D Prathyusha, GRK Prasad… - Microsystem …, 2020 - Springer
… The perforations are … analysis of RF MEMS shunt switch with microstrip patch antenna for
high frequency applications. The switch obtained actuation voltage is 12 V, and the switching

Comprehensive analysis and design of capacitive RF mems switches for reconfigurable microstrip patch antenna

MR Sathuluri, G Sasikala - Wireless Personal Communications, 2022 - Springer
… From the performance analysis in the Sect. 4, we have proposed an shunt capacitive RF
MEMS switch with perforated serpentine structure with non-uniform meanders and AlN as a …