Study of Strained-SiGe Channel P-MOSFET Using Silvaco TCAD: Impact of Channel Thickness

SNFN Mohd Salleh, AF Abd Rahim… - Key Engineering …, 2023 - Trans Tech Publ
… and 45 nm technology nodes because the conductivity mass of … as Si, but its lattice constant
is larger by 4.2% for pure Ge [6]. … Starting with the 90 nm CMOS technology node, embedded …

Study of Strained-SiGe Channel P-MOSFET Using Silvaco TCAD: Impact of Channel Thickness

SNFNM Salleh, AF Abd Rahim, NSM Razali… - Engineering Materials …, 2023 - torrossa.com
… and 45 nm technology nodes because the conductivity mass of … as Si, but its lattice constant
is larger by 4.2% for pure Ge [6]. … Starting with the 90 nm CMOS technology node, embedded …