… A low temperature SiCl 4 /H 2 plasma process is well suited to etch III-V/Ge heterostructures
… To assess the plasma damage, the via-hole etching and the impact of hydrogen addition on …

… This study indicates that a plasma etching process followed … and their impact on III–V/Ge
solar cell performance have yet … In this study, III–V/Ge triple junction solar cells were fabricated …

… Multijunction solar cells have shown their ability to achieve … The effect of the dopant or charge
carrier distribution in the … method that is used in this thesis is wet etching in a flow cell with …

… Influence of plasma process on III-V/Ge multijunction solar cell via etching, Solar Energy
Materials and Solar Cells… low damage III-V/Ge heterostructure etching for multijunction solar cell …

… , comprising a wide range of III‒As‒P‒N/GaAs and III‒V/Ge … the etching of III‒V alloys in
multijunction solar cell structures by aqueous solutions containing HIO 3 and HCl. The effects …

… Improvement of triple-junction (3J) III-V/Ge solar cells … of the wet etching processes [17], we
performed etching on blanket … We observed previously the impact of the electrical coupling …

… Photolithography and etching by CF 4 inductively coupled plasma were performed to …
The impact of annealing samples with passivated contacts was investigated by using a rapid …

… of the developed process and the impact of cell dimensions as … First, the fragililty of the III-V/Ge
cell structure is susceptible to defect … plasma etching for the singulation step (full cut). The …

… solar cells which have better conversion efficiency. For this, there are new group of solar cells
known as multi-junction solar cells … impact of AOD (at 500 nm) PWV, optical AM on module …

… Porous Ge is fabricated by electrochemical etching and is … enough to have any detectable
effect on the in situ measurements … (a) 19 mm × 15 mm III–V/Ge stack with detachment force …