… Silicon-on-insulator (SOI) is the dominant waveguide platform … Here, we present suspended
Si and Ge devices that can … To measure the membrane stiffness, we used a silicon force …

… on channel WGs in the silicon-on-insulator (SOI) structure, have … as monolithic integration of
SOI ring resonators with a laser … of the design of a suspended membrane waveguide (SMW) …

… require coverage across the visible or mid infrared (mid-IR) … -chip silicon waveguides and
cascaded microring resonators based … of a suspended AlN ring resonator made adjacent to a …

… material platforms, such as silicon-on-insulator (SOI), … integration with the existing matured
mid-infrared (MIR) photonic … interferometers (MZI) and ring resonators will further induce non-…

… , the material limitation from silicon-on-insulator platform (SOI), … widely employed, especially
the microring resonators (MRR). … , a suspended Si membrane with waveguide patterned is …

… defined in the top Si device layer of a silicon-on-insulator (SOI) … in a suspended structure with
multiple waveguide passes in [… evanescent field in waveguides [72] and ring resonators [73] …

… For example, the silicon dioxide layer in silicon-on-insulator (… the gap between the membrane
waveguide and the unetched … Suspended waveguides with SWG claddings have been …

… , mostly based on the silicon-on-insulator (SOI) platform. SOI … 2 to create a suspended Si
membrane. Using this approach, … Q-factor (~278 000) of the ring resonators (60 μm in radius), …

… in the subwavelength grating (SWG) waveguides based devices for signal … as ring resonators
for surface and bulk sensing, couplers, suspended membrane waveguides for mid-infrared …

… in a 700 nm silicon on insulator wafer. The samples were … suspended structures capable to
operate in the mid-infrared. This … The authors also shown the design of a microring resonator …