A two-degree-of-freedom (2-DoF) flexure-based nanopositioner is investigated for the planar
scanning tasks, and a robust controller design scheme based on the convex inner …

This paper develops a novel 3-DOF damped flexure-guided nanopositioning stage for the
need for highspeed and high-frequency positioning or manipulation, which embeds three …

The traditional methodology utilized in dynamic tracking control synthesis is usually model-
based, and therefore, the performance is highly dependent on a precise mathematical …

For high-precision contouring tasks in a typical Cartesian motion system, multiaxis
cooperation is a long-standing challenging issue. Inevitably, various factors pose substantial …

In this paper, a bi-axial large stroke beam-flexure nano-manipulating servo stage is
developed based on a novel compact flexure mechanism consisting of Z-shaped and Π …

A novel multi-actuated nanopositioning stage with stacked structure has been developed.
The aim is to achieve both high bandwidth and large motion range. Symmetric flexures are …

This paper presents a systematic modeling and control methodology for a two-dimensional
flexure beam-based servo stage supporting micro/nano manipulations. Compared with …

This paper proposes a high precision contour tracking strategy for an XY nanomanipulator.
Specifically, the proposed control method includes a repetitive controller (RC) to achieve …

This paper presents an offset-free model predictive controller for fast and accurate control of
a spherical soft robotic arm. In this control scheme, a linear model is combined with an …

Lightly-damped dynamics of a flexure-based mechanism will tend to largely deteriorate the
broadband control performance if its hysteresis nonlinearity has been compensated. This …