AlN-on-SOI platform-based micro-machined hydrophone

J Xu, X Zhang, SN Fernando, KT Chai, Y Gu - Applied Physics Letters, 2016 - pubs.aip.org
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
被引用次数：54 相关文章
[PDF] researchgate.net

[PDF][PDF] AlN-on-SOI platform-based micro-machined hydrophone

J Xu, X Zhang, SN Fernando, KT Chai… - Applied Physics …, 2016 - researchgate.net
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …

AlN-on-SOI platform-based micro-machined hydrophone

J Xu, X Zhang, SN Fernando, KT Chai, Y Gu - Applied Physics Letters, 2016 - pubs.aip.org
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …

AlN-on-SOI platform-based micro-machined hydrophone

J Xu, X Zhang, SN Fernando, KT Chai… - Applied Physics …, 2016 - ui.adsabs.harvard.edu
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …
[PDF] a-star.edu.sg

[PDF][PDF] AlN-on-SOI platform-based Micro-Machined hydrophone

J Xu, X Zhang, SN Fernando, KT Chai, Y Gua - oar.a-star.edu.sg
This paper reports a piezoelectric aluminum nitride (AlN) based micro-machined infrasonic
hydrophone. We have conducted a systematic design study for the hydrophone sensor to …