Two dimensional profiling using secondary ion mass spectrometry

MG Dowsett, GA Cooke - Journal of Vacuum Science & Technology B …, 1992 - pubs.aip.org
As device dimensions decrease and packing densities increase, the need for accurate
mapping of dopant profiles in at least two dimensions is becoming ever more acute. Such …
被引用次数：21 相关文章

[引用][C] Two dimensional profiling using secondary ion mass spectrometry

MG Dowsett, GA Cooke - Journal of Vacuum Science …, 1992 - ui.adsabs.harvard.edu
Two dimensional profiling using secondary ion mass spectrometry - NASA/ADS Now on home
page ads icon ads Enable full ADS view NASA/ADS Two dimensional profiling using secondary …

Two dimensional profiling using secondary ion mass spectrometry

MG Dowsett, GA Cooke - Journal of Vacuum Science & Technology B …, 1992 - pubs.aip.org
As device dimensions decrease and packing densities increase, the need for accurate
mapping of dopant profiles in at least two dimensions is becoming ever more acute. Such …

[引用][C] Two dimensional profiling using secondary ion mass spectrometry

MG DOWSETT, GA COOKE - Journal of vacuum science and …, 1992 - pascal-francis.inist.fr
Two dimensional profiling using secondary ion mass spectrometry CNRS Inist Pascal-Francis
CNRS Pascal and Francis Bibliographic Databases Simple search Advanced search Search by …

[引用][C] Two dimensional profiling using secondary ion mass spectrometry

MG Dowsett - Journal of Vacuum Science & Technology B …, 1992 - cir.nii.ac.jp
Two dimensional profiling using secondary ion mass spectrometry | CiNii Research CiNii
国立情報学研究所 学術情報ナビゲータ[サイニィ] 詳細へ移動 検索フォームへ移動 論文・データを …

[引用][C] Two dimensional profiling using secondary ion mass spectrometry

MG DOWSETT, GA COOKE - Journal of vacuum …, 1992 - American Institute of Physics