Temperature dependence of quality factor in MEMS resonators

B Kim, MA Hopcroft, RN Candler… - Journal of …, 2008 - ieeexplore.ieee.org
The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …
被引用次数：336 相关文章
[PDF] stanford.edu

[PDF][PDF] TEMPERATURE DEPENDENCE OF QUALITY FACTOR IN MEMS RESONATORS

B Kim, CM Jha, T White, RN Candler, M Hopcroft… - micromachine.stanford.edu
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …
[PDF] researchgate.net

[PDF][PDF] TEMPERATURE DEPENDENCE OF QUALITY FACTOR IN MEMS RESONATORS

B Kim, CM Jha, T White, RN Candler, M Hopcroft… - researchgate.net
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …

[引用][C] Temperature Dependence of Quality Factor in MEMS Resonators

B KIM, MA HOPCROFT, RN CANDLER… - Journal of …, 2008 - pascal-francis.inist.fr
Temperature Dependence of Quality Factor in MEMS Resonators CNRS Inist Pascal-Francis
CNRS Pascal and Francis Bibliographic Databases Simple search Advanced search Search by …

Temperature Dependence of Quality Factor in MEMS Resonators

B Kim, CM Jha, T White, RN Candler… - … Conference on Micro …, 2006 - ieeexplore.ieee.org
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …

[引用][C] Temperature Dependence of Quality Factor in MEMS Resonators

B Kim, MA Hopcroft, RN Candler, CM Jha… - Journal of …, 2008 - cir.nii.ac.jp

Temperature Dependence of Quality Factor in MEMS Resonators

B Kim, MA Hopcroft, RN Candler, CM Jha… - Journal of …, 2008 - infona.pl
The temperature dependence of the quality factor of microelectromechanical system
(MEMS) resonators is analyzed and measured. For silicon MEMS resonators, there are …
[PDF] researchgate.net

[PDF][PDF] TEMPERATURE DEPENDENCE OF QUALITY FACTOR IN MEMS RESONATORS

B Kim, CM Jha, T White, RN Candler, M Hopcroft… - researchgate.net
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …

Temperature Dependence of Quality Factor in MEMS Resonators

B Kim, CM Jha, T White, RN Candler, M Hopcroft… - 19th IEEE International … - infona.pl
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …
[PDF] stanford.edu

[PDF][PDF] TEMPERATURE DEPENDENCE OF QUALITY FACTOR IN MEMS RESONATORS

B Kim, CM Jha, T White, RN Candler, M Hopcroft… - micromachine.stanford.edu
The temperature dependence of the quality factor, Q, of encapsulated MEMS resonators is
analyzed in an effort to understand the temperature regimes where different energy loss …