M Razeghi - Semiconductors and Semimetals, 1985 - scholars.northwestern.edu
This chapter discusses that metallo-organic chemical vapor deposition (MOCVD) has emerged as a valuable tool for the growth of device-quality epitaxial layers of InP, G 0.47 In …
M Razeghi - Semiconductors and Semimetals, 1985 - books.google.com
The growth of semiconductor III-V compounds by chemical vapor deposition (CVD) using organometallics and hydrides as elemental Sources has developed into a viable process …