[图书][B] Integration of CMOS-MEMS resonators for radiofrequency applications in the VHF and UHF bands

J Teva Meroño - 2007 - ddd.uab.cat
This thesis is focused on the monolithic integration of microresonators in a commercial
CMOS technology, AMS-0.35 um, by using the standard layers of the process. The structures …

[PDF][PDF] Integration of CMOS-MEMS resonators for radiofrequency applications in the VHF and UHF bands

JT Merono - 2007 - core.ac.uk
This thesis is focused on the monolithic integration of microresonators in a commercial
CMOS technology, AMS-0.35 µm, by using the standard layers of the process. The structures …

[HTML][HTML] Integration of CMOS-MEMS resonators for radiofrequency applications in the VHF and UHF bands

J Teva Meroño - ddd.uab.cat
Aquesta tesi doctoral te com a objectiu fonamental la integració monolítica de
microressonadors en una tecnologia comercial, AMS 0.35 um, tot utilitzant les capes …

[HTML][HTML] Integration of CMOS-MEMS resonators for radiofrequency applications in the VHF and UHF bands

JT Meroño - 2007 - dialnet.unirioja.es
Aquesta tesi doctoral te com a objectiu fonamental la integració monolítica de
microressonadors en una tecnologia comercial, AMS 0.35 um, tot utilitzant les capes …