Fabrication and characterization of an MOEMS gyroscope based on photonic bandgap materials

C Trigona, B Andò, S Baglio - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
This paper focuses on a micro-optoelectro-mechanical vibratory gyroscope that provides an
optical output and operates in a resonant condition. A custom fabrication technology, based …

[引用][C] Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap Materials

C Trigona, B Ando, S Baglio - IEEE Transactions on …, 2016 - ui.adsabs.harvard.edu
Fabrication and Characterization of an MOEMS Gyroscope Based on Photonic Bandgap
Materials - NASA/ADS Now on home page ads icon ads Enable full ADS view NASA/ADS …