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Control of a novel MEMS Fast Steering Mirror with improved quasi-static performance

Y Zihao, W Lihao, W Yang, Z Yonggui, L Yichen… - IEEE …, 2023 - ieeexplore.ieee.org
This paper presents a control algorithm for a micro-electro-mechanical system (MEMS) fast
steering mirror (FSM), whose performance is poor in open loop control mode. Based on the …
被引用次数：1 相关文章

[引用][C] Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance

Y Zihao, W Lihao, W Yang, Z Yonggui… - IEEE …, 2023 - ui.adsabs.harvard.edu
Control of a MEMS Fast Steering Mirror With Improved Quasi-Static Performance - NASA/ADS
Now on home page ads icon ads Enable full ADS view NASA/ADS Control of a MEMS Fast …