Microfabricated actuators and their application to optics
1994 - osti.gov
Several authors have given overviews of microelectromechanical systems, including
microactuators. In our presentation we will review some of these results, and provide a brief …
microactuators. In our presentation we will review some of these results, and provide a brief …
Microfabricated actuators and their application to optics
J Sniegowski, E Garcia - spiedigitallibrary.org
ABSTRACT Several authors [1, 2] have given overviews of microelectromechanical systems,
including microactuators. In our presentation we will review some of these results, and …
including microactuators. In our presentation we will review some of these results, and …
[PDF][PDF] Microfabricated Actuators and Their Application to Optics
JJ Sniegowski, EJ Garcia - sandia.gov
We present a description of a three-level mechanical polysilicon surface-micromachining
technology with a discussion of the advantages of this level of process complexity. This …
technology with a discussion of the advantages of this level of process complexity. This …
[PDF][PDF] Microfabricated Actuators and Their Application to Optics
JJ Sniegowski, EJ Garcia - wp.optics.arizona.edu
ABSTRACT Several authors [1, 2] have given overviews of microelectromechanical systems,
including microactuators. In our presentation we will review some of these results, and …
including microactuators. In our presentation we will review some of these results, and …
[PDF][PDF] Microfabricated Actuators and Their Application to Optics
JJ Sniegowski, EJ Garcia - Citeseer
We present a description of a three-level mechanical polysilicon surface-micromachining
technology with a discussion of the advantages of this level of process complexity. This …
technology with a discussion of the advantages of this level of process complexity. This …
Microfabricated actuators and their application to optics
JJ Sniegowski, EJ Garcia - Micro-Optics/Micromechanics …, 1995 - ui.adsabs.harvard.edu
Several authors have given overviews of microelectromechanical systems, including
microactuators. In our presentation we review some of these results, and provide a brief …
microactuators. In our presentation we review some of these results, and provide a brief …