CMOS–MEMS resonators: From devices to applications

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - Elsevier
This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …
被引用次数：107 相关文章

CMOS-MEMS resonators: From devices to applications

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - portalrecerca.uab.cat
Abstract© 2014 Elsevier BV All rights reserved. This review summarizes the reported MEMS
resonators integrated monolithically in CMOS technology and their main applications as …
[PDF] academia.edu

[PDF][PDF] CMOS–MEMS resonators: From devices to applications

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - academia.edu
abstract This review summarizes the reported MEMS resonators integrated monolithically in
CMOS technology and their main applications as oscillator circuits in timing applications and …

CMOS–MEMS resonators: From devices to applications

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - infona.pl
This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

CMOS-MEMS resonators

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - dl.acm.org
Display Omitted Review on CMOS-MEMS resonators: main technological approaches.
Opportunities of CMOS-MEMS oscillators towards crystal quartz substitution. CMOS-MEMS …
[PDF] academia.edu

[PDF][PDF] CMOS–MEMS resonators: From devices to applications

A Uranga, J Verd, N Barniol - Microelectronic Engineering, 2015 - academia.edu
abstract This review summarizes the reported MEMS resonators integrated monolithically in
CMOS technology and their main applications as oscillator circuits in timing applications and …